World-Class Resources > CNSE Wafer Processing Research & Development > Analytical Services > SEM

LEO 1550 Scanning Electron Microscope with a ThermoNoran Voyager Energy Dispersive X-ray Detector and a MaxRAY WDS system

Excellent resolution at low beam voltages allows the LEO 1550 SEM to image organic particles and insulators with minimal charging effects.

Imaging resolution

• 1 nm@15kV  
• 3 nm @1kV 

EDS resolution  100 nm 

Wavelength Dispersion Spectroscopy (WDS) 
Film thickness resolution  5 nm 
Sample size  up to 6" 

Hitachi S-4800 SEM with Energy Dispersive X-ray Detector 

Imaging resolution  1.5 nm@30kV 
EDS resolution  100 nm 
Film thickness resolution  20 nm 
Maximum sample size  7.5 cm diameter